Film thickness measurement system

• THERMA-WAVE OP2600/OP2690

• THERMA-WAVE OP3260/OP3290

• THERMA-WAVE OP5240/OP5340/OP7341

• KLA UV1050/1080

• KLA UV1250/1280

• KLA F5X/FX100/FX200

Particle counter system

• KLA Surfscan SFS 6200/6220

• KLA Surfscan SFS 6400/6420

• KLA Surfscan SP1 Classic/SP1-TBI/SP1-DLS

• KLA Surfscan SP2/SP2XP

Resist mapping system

• KLA RS35/RS55

• KLA RS75

• KLA RS100/RS200

Stress measurement system

• KLA FLX2320/2320S

• KLA FLX5400/5500

Profiler (Step Height)

• KLA P10/P11/P15/P16/P17/P170

• KLA P20H/P22/P30

• KLA HRP2X0

• KLA HRP320/HRP340/HRP350

Dosage monitor system

• THERMA-WAVE TP400/TP420

• THERMA-WAVE TP500/TP500XP

• THERMA-WAVE TP630/TP630XP

• THERMA-WAVE TP680/TP680XP

Overlay measurement system

• KLA OVERLAY 5200/5200XP

• KLA ARCHER 10/ARCHER XT

Spare parts

• Power supply

• Motor

• PCB Assy

• Laser

• Light source and optical components

• Robot and controller

• Asyst 200mm SMIF indexer

• Asyst 300mm loadport

Other products